Electron beam induced deposition and ablation nanofabrication facility

Funding: 2004: $184,163

Project Member(s): Phillips, M., Cortie, M.

Funding or Partner Organisation: Australian National University (The Australian National University)
Macquarie University
Australian Research Council (ARC Linkage Infrastructure)

Start year: 2004

Summary: Electron beam induced deposition and ablation nanofabrication facility,Phillips,A/Prof MR Phillips Prof MB Cortie A/Prof EM Goldys Dr KS Butcher Dr HH Tan,EE,20030403185356,H26683,''Microstructural Analysis Unit, University of Technology, Sydney

Publications:

De Silva, KSB, Keast, VJ, Gentle, A & Cortie, MB 2017, 'Optical properties and oxidation ofα-phase Ag–Al thin films', Nanotechnology, vol. 28, no. 9, pp. 095202-095202.
View/Download from: Publisher's site

Keywords: Nanotechnology, Nanofabrication, Electron beam Induced Deposition, Electron Beam Induced Ablation, Nanoscale Lithography, Optoelectronic devices,

FOR Codes: Materials Engineering, Nanotechnology, Instruments and Techniques, Scientific instrumentation, Other, Synchrotrons; Accelerators; Instruments and Techniques, Scientific Instruments, Construction Materials Performance and Processes not elsewhere classified, Synchrotrons and accelerators, Glass materials

Acknowledgement of Country

UTS acknowledges the Gadigal people of the Eora Nation, the Boorooberongal people of the Dharug Nation, the Bidiagal people and the Gamaygal people, upon whose ancestral lands our university stands. We would also like to pay respect to the Elders both past and present, acknowledging them as the traditional custodians of knowledge for these lands.