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Electron beam induced deposition and ablation nanofabrication facility

Funding: 2004: $184,163

Project Member(s): Phillips, M., Cortie, M.

Funding or Partner Organisation: Australian Research Council (ARC Linkage Infrastructure)
Australian National University (The Australian National University)
Macquarie University

Start year: 2004

Summary: Electron beam induced deposition and ablation nanofabrication facility,Phillips,A/Prof MR Phillips Prof MB Cortie A/Prof EM Goldys Dr KS Butcher Dr HH Tan,EE,20030403185356,H26683,''Microstructural Analysis Unit, University of Technology, Sydney


De Silva, KSB, Keast, VJ, Gentle, A & Cortie, MB 2017, 'Optical properties and oxidation of α-phase Ag-Al thin films.', Nanotechnology, vol. 28, no. 9, pp. 095202-095202.
View/Download from: UTS OPUS or Publisher's site

Keywords: Nanotechnology, Nanofabrication, Electron beam Induced Deposition, Electron Beam Induced Ablation, Nanoscale Lithography, Optoelectronic devices,

FOR Codes: Materials Engineering, Nanotechnology, Instruments and Techniques, Scientific instrumentation, Other, Synchrotrons; Accelerators; Instruments and Techniques, Scientific Instruments, Construction Materials Performance and Processes not elsewhere classified