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Subsurface Atomic Force Microscopy using Dual Probes

Project Member(s): Ruppert, M.

Funding or Partner Organisation: Australian Research Council (ARC Discovery Projects)
Australian Research Council (ARC Discovery Projects)

Start year: 2021

Summary: The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, intellectual property, and the potential for a start-up venture. The benefits to Australia should include the creation of new job opportunities and the development of local expertise in a high-value market sector.

FOR Codes: Microelectromechanical systems (MEMS), Dynamics, vibration and vibration control, Expanding knowledge in engineering, Scientific instruments